It is impossible to tell for sure but most commonly it is small mammals like raccoons, or skunks, searching for insects or other small invertebrates. In this way they are helpful, both consuming some that are pests while also aerating the soil.
If you are lacking ground covering plants/grass, some of which may have died back already for the year, the damage may be more noticeable.
If needed, the remedy is to either plant or rake and re- seed the area, which would also protect your soil from erosion.
Should you need to thicken up your lawn, now is the the best window of time to do so:

https://extension.umd.edu/resource/lawn-renovation-and-overseeding/

Here is our page on Skunks: 
https://extension.umd.edu/resource/skunks/


Christine